Method Of Making Inorganic Or Inorganic/organic Hybrid Films


A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises vaporizing a metal alkoxide, condensing the metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer is disclosed.

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Document History
  • Publication: Jul 10, 2008
  • Application: Dec 28, 2007
    WO US 2007/0089088 W
  • Priority: Dec 29, 2006
    US US 88265106 P

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