Methods Of Fabricating Nanoscale-to-microscale Structures


Methods for the production of shaped nanoscale-to-microscale structures, wherein a nanoscale-to-microscale template is provided having an original chemical composition and an original shape, and the nanoscale-to-microscale template subjected to a chemical reaction, so as to partially or completely convert the nanoscale-to-microscale template into the shaped nanoscale-to-microscale structure having a chemical composition different than the original chemical composition and having substantially the same shape as the original shape, being a scaled version of the original shape. The shaped nanoscale-to-microscale structure formed comprises an element (such as silicon), a metallic alloy (such as a silicon alloy), or a non-oxide compound (such as silicon carbide or silicon nitride).

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Document History
  • Publication: Nov 10, 2009
  • Application: Aug 13, 2007
    US US 83821107 A
  • Priority: Aug 13, 2007
    US US 83821107 A
  • Priority: Aug 11, 2006
    US US 83746506 P

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