Motion Sensor, Accelerometer, Inclination Sensor, Pressure Sensor, And Tactile Controller

  • Published: Jul 30, 2008
  • Earliest Priority: Jan 24 2007
  • Family: 7
  • Cited Works: 0
  • Cited by: 6
  • Cites: 5
  • Additional Info: Published

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A motion sensor may include, but is not limited to, a substrate, a beam, a weight, a piezoelectric film, and a first electrode. The beam is supported by the substrate. The beam is elastically deformable. The weight is attached to the beam. The piezoelectric film follows and extends along at least a part of the beam. The piezoelectric film may include, but is not limited to, an organic piezoelectric film. The first electrode is disposed on the piezoelectric film.


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Document History
  • Publication: Jul 30, 2008
  • Application: Jan 23, 2008
    EP EP 08001178 A
  • Priority: Jan 24, 2007
    JP 2007014334 A

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