Method Of Transferring A Thin Crystalline Semiconductor Layer


A method for transferring a thin semiconductor layer from one substrate to another substrate involves depositing a thin epitaxial monocrystalline semiconductor layer on a substrate having surface contaminants. An interface that includes the contaminants is formed in between the deposited layer and the substrate. Hydrogen atoms are introduced into the structure and allowed to diffuse to the interface. Afterward, the thin semiconductor layer is bonded to a second substrate and the thin layer is separated away at the interface, which results in transferring the thin epitaxial semiconductor layer from one substrate to the other substrate.

Download PDF
Document Preview
Document History
  • Publication: Jul 3, 2008
  • Application: Dec 22, 2006
    WO US 2006/0049296 W
  • Priority: Dec 22, 2006
    US US 2006/0049296 W

Sign in to the Lens