Shielded Probe For Testing A Device Under Test

Abstract

A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and the probe tip.


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Document History
  • Publication: Mar 10, 2009
  • Application: Oct 19, 2007
    US US 97547107 A
  • Priority: Oct 19, 2007
    US US 97547107 A
  • Priority: Aug 3, 2007
    US US 88895707 A
  • Priority: Mar 28, 2006
    US US 39189506 A
  • Priority: May 23, 2003
    US US 44517403 A

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