Thermal Optical Chuck

Abstract

An accessible optical path to a lower surface of a heatable device under test is provided by a thermal optical chuck comprising a transparent resistor deposited on transparent plate arranged to supporting the device in a probe station.


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Document History
  • Publication: Mar 17, 2009
  • Application: Dec 1, 2006
    US US 60733106 A
  • Priority: Dec 1, 2006
    US US 60733106 A
  • Priority: May 6, 2005
    US US 12368705 A
  • Priority: Jun 7, 2004
    US US 57775204 P

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