Double Layer Carbon Nanotube-based Structures And Methods For Removing Heat From Solid-state Devices

  • Published: Aug 21, 2008
  • Earliest Priority: May 16 2006
  • Family: 3
  • Cited Works: 0
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  • Cites: 15
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(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT)

(19) World Intellectual Property Organization International Bureau (43) International Publication Date

29 November 2007 (29.11.2007)
(51) International Patent Classification: HOlL 23/34 (2006.01)

PCT

(10) International Publication Number

W O 2007/137099 A3
(72) Inventors; and (75) Inventors/Applicants (for US only): WACKER, Bar¬ bara [US/US]; 18301 Vanderbilt Drive, Saratoga, CA 95070 (US). SUHIR, Ephraim [US/US]; 727 AIvina Court, Los Altos, CA 94024 (US). DEY, Subrata [US/US]; 43433 Laurel Glen Common, Fremont, CA 94539 (US). SCHWARTZ, Peter [US/US]; 4956 Janet Court, Livermore, CA 94550 (US). KAVARI, Rahim [US/US]; 3789 Acapulco Drive, Campbell, CA 95008 (US). (74) Agents: BEYERS, Robert, B . et al; Morgan Lewis & Bockius LLP, 2 Palo Alto Square, 3000 El Camino Real, Suite 700, Palo Alto, CA 94306 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, MG, MK, MN, MW, MX, MY,

(21) International Application Number: PCT/US2007/069084 (22) International Filing Date: (25) Filing Language: (26) Publication Language: (30) Priority Data: 60/800,935 60/874,579 60/908,966 11/749,128
16 May 2007 (16.05.2007)

English English

16 May 12 December 29 March 15 May

2006 2006 2007 2007

(16.05.2006) ( 12 . 12.2006) (29.03.2007) ( 15 .05 .2007)

US US US US

(71) Applicant (for all designated States except US): NANOCONDUCTION, INC. [US/US]; 1244 Reamwood Avenue, Sunnyvale, CA 94089 (US).

[Continued on next page]
(54) Title: DOUBLE LAYER CARBON NANOTUBE-BASED STRUCTURES AND METHODS FOR REMOVING HEAT FROM SOLID-STATE DEVICES
(57) Abstract: Carbon nanotube-based structures and methods for r e moving heat from solid-state devices are disclosed. In one embodiment, a copper substrate has thermal interface materials on top of front and back surfaces of the copper substrate. Each thermal interface material (TIM) comprises a layer of carbon nanotubes and a filler material located b e tween the carbon nanotubes. The summation of the thermal resistance of the copper substrate, the bulk thermal resistance of each TIM, the contact resistance between each TIM and the copper substrate, the contact r e si s tance between one TIM and a solid-state device, and the contact resistance between the other TIM and a heat conducting surface has a value of 0.06 cm KTW or less.

MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.

PT, RO, SE, SI, SK, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).

(84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM), European (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL,

Published: — with international search report — before the expiration of the time limit for amending the claims and to be republished in the event o receipt of f amendments
(88) Date of publication of the international search report: 2 1 August 2008

INTERNATIONAL SEARCH REPORT

International application No
PCT/US 07/69084

A

CLASSIFICATION O F SUBJECT MATTER

IPC(8) - H01 L 23/34 (2007.1 0 )

USPC - 257/712, 257/720, 257/E33.066, 257/E33.075
According to International Patent Classification (IPC) o r to both national classification and IPC B FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols) USPC - 257/712, 257/720, 257/E33 066, 257/E33 075

Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched

Electronic data base consulted during the international search (name of data base and, where practicable, search terms used) WEST (PGPB 1USPT 1USOCEPAB 1JPAB), Dialog Classic Files 654, 652, 351, 2 , 6 , 35, 65, Google Scholar, Google Patents, USPTO Web Page copper substrate, thermal interface, nanotubes, multiwall, integrated circuit, titanium nit πde, iron, nickel, catalyst, heat conductor, graphene, antioxidant, viscosity, modulus

C

DOCUMENTS CONSIDERED T O B E RELEVANT Citation o f document, with indication, where appropriate, o f the relevant passages
U S 2005/0006754 A 1 (ARIK et a l ) 13 Jan 2005 (13 0 1 2005), para [0007], [0023]-[0025], [0027], [0028], [0030], [0048], Fig 1

Category*

Relevant to claim N o
1-283

U S 2005/0037204 A 1 (OSIANDER e t a l ) 17 Feb 2005 (17 02 2005), para [0003], [0005], [0018], [0019], [0022], [0065], [0073], [0084], [0089], [0099], [0123], [0124], [0131], [0132], [0139], [0143], Fig 3

1-283

U S 2005/0079132 A 1 (WANG e t a l ) 14 Apr 2005 (14 04 2005), para [01 18], [0174], [0195], [0200], [0232], [0255], [0256], [0286], [0370], [0430], [051 1],[0575], [0577], [0782], [0783], [0865], [0878], [1387], [1437]

1-283

US 4,408,220 A (CALABRO) 04 Oct 1983 (04 10 1983), col 1 , In 21-26, col 2 , In 22-25, col 3 , In 52-55, Fig 7

23,24,26-28,32-34,67-77, 135,136,170,171, 173-185, 189, 220-269, 275, 277-283

U S 2005/027221 1 A 1 (BROWNE et a l ) 08 Dec 2005 (08 12 2005), para [0031], [0041]

13-15, 120-122, 132-134, 149-151, 160-162, 200202, 212-214, 233-235, 244-246

Further documents are listed in the continuation o f Box C
• "A" "E" "L" "O" "P" Special categories o f cited documents document defining the general state o f the art which is not considered t o be o f particular relevance earlier application o r patent but published o n o r after the international filing date document which may throw doubts o n priority cla ιm(s) o r which is cited to establish the publication date o f another citation or other special reason (as specified) document referring to a n oral disclosure, use, exhibition o r other means document published prior to the international filing date but later than the priority date claimed "T"

D
later document published after the international filing date or priority date and not i n conflict with the application but cited to understand the principle o r theory underlying the invention document o f particular relevance, the claimed invention cannot be considered novel o r cannot be considered t o involve a n inventive step when the document is taken alone document o f particular relevance, the claimed invention cannot be considered t o involve a n inventive step when the document i s combined with one o r more other such documents, such combination being obvious t o a person skilled in the art document member o f the same patent family "X"

"Y"

"&"

Date o f the actual completion o f the international search
16 November 2007 (16 1 1 2007)
Name and mailing address o f the ISA/US Mail Stop PCT, Attn ISA/US, Commissioner for Patents O Box 1450, Alexandria, Virginia 22313-1450 Facsimile N o 571-273-3201

Date o f mailing o f the international search report

3 JUN
Authorized officer
Lee W Young
PCT Helpdesk 571-272-4300 PCTOSP 571-272 7774

Form PCT/ISA/210 (second sheet) (April 2007)

ARCH REPORT

International application No
PCTIUS 07/69084

Box No. I I

Observations where certain claims were found unsearchable (Continuation o f item 2 o f first sheet)

This international search report has not been established in respect o f certain claims under Article 17(2)(a) for the following reasons 1I I Claims Nos because they relate to subject matter not required to be searched by this Authority, namely

Claims Nos because they relate to parts o f the international application that do not comply with the presc π bed requirements to such an extent that n o meaningful international search can be carried out, specifically

Claims Nos because they are dependent claims and are not drafted in accordance with the second and third sentences o f Rule 6 4(a) Box No. Ill Observations where unity o f invention is lacking (Continuation o f item 3 o f first sheet)

This International Searching Authority found multiple inventions in this international application, as follows
The inventions listed a s Groups 1-3 do not relate to a single general inventive concept under PCT Rule 13 1 because, under PCT Rule 13 2 , they lack the same o r corresponding special technical features for the following reasons Group 1 , claims 1-77, 137-189, 270, 273, 275, 277, 279 and 282 are drawn to a n article o f manufacture Group 2 , claims 78-134, 190-265, 271, 274, 276, 278, 280, 281 and 283 are drawn to a method of forming the article o f manufacture Group 3 , claims 135-136, 266-269 and 272 are drawn to a method o f use the article of manufacture

1 L/Nl As all required additional search fees were timely paid b y the applicant, this international search report covers all searchable claims 2 I I As all searchable claims could be searched without effort justifying additional fees, this Authority did not invite payment o f additional fees I A s only some o f the required additional search fees were timely paid by the applicant, this international search report covers only those claims for which fees were paid, specifically claims Nos

3

I

I

No required additional search fees were timely paid by the applicant Consequently, this international search report is restricted to the invention first mentioned in the claims, it is covered by claims Nos

Remark o n Protest

| I l/\l

|

The additional search fees were accompanied by the applicant's protest and, where applicable, the payment o f a protest fee

I The additional search fees were accompanied by the applicant's protest but the applicable protest fee was not paid within the time limit specified in the invitation
No protest accompanied the payment o f additional search fees

Form PCT/ISA/210 (continuation o f first sheet (2)) (April 2007)

INTERNATIONAL SEARCH REPORT

International application No
PCT/US 07/69084

C (Continuation)
Category*

DOCUMENTS CONSIDERED T O B E RELEVANT Citation o f document, with indication, where appropriate, o f the relevant passages Relevant t o claim N o
9 , 10, 16-21, 116, 117, 128, 129, 145, 146, 156, 157, 163-168, 196, 197,

U S 2006/0038299 A 1 (HIRAKATA et a l ) 2 3 Feb 2006 (23 0 2 2006), para [0038], [0078], [0160], [0247], [0273], [0294]

208, 209, 229, 230, 240, 241, 247-252

U S 2005/0206293 A 1 (TAOMOTO et a l ) 2 2 Sep 2005 (22 0 9 2005), para [0004], [0083]

7 , 114, 126, 143, 154, 194, 206, 227, 238

US 2003/0035917 A 1 (HYMAN) 2 0 Feb 2003 (20 02 2003), para [0135], [0232], [0298], [0514], [0529], [0538], [0545], [0774], [ 1 128]

22-28, 169-175, 253-259

U S 2004/0040834 A 1 (SMALLEY et a l ) 04 Mar 2004 (04 03 2004), para [0003], [01 18], [01 19], [0123], [0129], [0138], Fig 3A-3G

62, 65, 66, 109, 1 10, 186 -189, 215, 216
79-81

U S 2004/01 18697 A 1 (WEN et a l ) 24 Jun 2004 (24 06 2004), para [0041], [0044]

U S 2004/0161949 A 1 (YADAV e t a l ) 19 Aug 2004 (19 08 2004), para [0103]

22,25,95-102,169,172, 253, 256
100, 102

US 2003/0203139 A 1 (REN et a l ) 30 Oct 2003 (30 10 2003), para [0010], [0045]

US 2004/0127621 A 1 (DRZAL e t a l ) 0 1 JuI 2004 (01 0 7 2004), para [0009]

9 , 10, 1 16, 128, 145, 146, 156,157,196, 197, 208, 209,229, 230, 240, 241

U S 2004/0101469 A 1 (DEMERS) 27 May 2004 (27 05 2004), para [0120]

1-77

US 2004/0234566 A 1 (QIU et a l ) 2 5 Nov 2004, (25 11 2004), para [0082], [0098]

10, 117, 129, 146, 157, 197, 209, 230, 241

Form PCT/ISA/210 (continuation o f second sheet) (April 2007)



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