Abstract

A process to manufacture a 3D mold to fabricate a high-throughput and low cost sub-micron 3D structure product is disclosed. The process integrates use of 2-photon laser lithography and 3D write technology to make a 3D mold of each layer of the 3D structure product, and then use nanoimprinting to form a sheet of polymer film of each layer of the 3D structure from the said 3D mold of that layer. Each layer of the sheet of polymer film is then fabricated into the sub-micron 3D structure product. The 3D mold of each layer of a high-throughput and low cost sub-micron 3D structure product, is further used to make master molds which is then used to form a sheet of polymer film of each layer of the 3D structure to fabricate the sub-micron 3D structure product. Applications using this process are also disclosed.


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Document History
  • Publication: Mar 1, 2016
  • Application: Apr 8, 2013
    US US 201313858509 A
  • Priority: Apr 8, 2013
    US US 201313858509 A
  • Priority: Sep 21, 2010
    US US 93380310 A
  • Priority: Nov 23, 2009
    SG SG 2009000443 W
  • Priority: Dec 22, 2008
    SG SG 2008094898 A

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